Novena Tec Non-ESC Heater
This product has been online for: 5 years, 8 months and 16 days
A new hardware solution with non-electrostatic approach that reduces front and back side particle defects and metal contamination
Has low and high temperature dual zone heater
Has reservoir air flow mechanism
Includes improved contact pads
Benefits
Provides minimum contact heater surface
Minimum backside wafer contact
Provides uniform gas distribution
Maintains stable backside pressure
Provides uniform heat transfer
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